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Design of a 1D phase-mask translational scanner for large-size spatially coherent grating printing

  • Olivier Parriaux EMAIL logo and Yves Jourlin
Published/Copyright: June 12, 2018
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Advanced Optical Technologies
From the journal Advanced Optical Technologies Volume 7 Issue 4

Abstract

Controlled translational displacement between a large-surface photosensitive planar substrate and a wide and short 1D grating phase-mask enables the printing of large-width, spatially highly coherent gratings of principally unlimited length, using a limited number of opto-mechanical control parameters. The phase-mask is illuminated by a temporally modulated exposure light sheet controlled by a displacement sensor. The proposed method is compared with existing techniques, and its functional elements and their combination are analyzed.

Keywords: diffraction and gratings; optical engineering; optical fabrication; photolithography
OCIS codes: 050.0050; 110.5220; 120.4610; 350.4600

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Received: 2018-03-20
Accepted: 2018-05-16
Published Online: 2018-06-12
Published in Print: 2018-08-28

©2018 THOSS Media & De Gruyter, Berlin/Boston

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News
  4. Editorial
  5. Optical materials
  6. Topical Issue: Optical Materials Part 1
  7. Tutorial
  8. Parametric analysis of thin multifunctional elastomeric optical sheets
  9. Review Article
  10. Deep-UV materials
  11. Research Articles
  12. Frequency-dependent electro-optics of liquid crystal devices utilizing nematics and weakly conducting polymers
  13. Design of a 1D phase-mask translational scanner for large-size spatially coherent grating printing
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https://doi.org/10.1515/aot-2018-0017
Keywords for this article
diffraction and gratings; optical engineering; optical fabrication; photolithography

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News
  4. Editorial
  5. Optical materials
  6. Topical Issue: Optical Materials Part 1
  7. Tutorial
  8. Parametric analysis of thin multifunctional elastomeric optical sheets
  9. Review Article
  10. Deep-UV materials
  11. Research Articles
  12. Frequency-dependent electro-optics of liquid crystal devices utilizing nematics and weakly conducting polymers
  13. Design of a 1D phase-mask translational scanner for large-size spatially coherent grating printing
  14. Single pulse femtosecond laser ablation of silicon – a comparison between experimental and simulated two-dimensional ablation profiles
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