Home Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
Article
Licensed
Unlicensed Requires Authentication

Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines

  • Kuang-Chao Fan

    Kuang-Chao Fan was born in Taiwan, R.O.C., on January 4, 1950. He received his BSc degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 1972, his MSc degree from the Status University of New York at Buffalo, in 1976, and his PhD degree from the University of Manchester Institute of Science and Technology, Manchester, U.K., in 1984, all in Mechanical Engineering. He has been a Professor of Mechanical Engineering at NTU since August 1989. He was the Chairman of the Institute of Industrial Engineering, NTU, the Chairman of Chinese Institute of Automation Technology, the Director of the Tjing Ling Industrial Research Institute, and Associate Dean of the Engineer College, NTU. Since 2001, he has been the Yangtze Professor at Hefei University of Technology, Hefei, China. His current research interests include manufacturing metrology, precision machining, machine tool technology, micro/nanomeasurement, optical switches, and tactile sensor.

     EMAIL logo     , Hung-Yu Wang

    Hung-Yu Wang was born in Taiwan, R.O.C., on September 22, 1981. He received his BS degree from Nation Taiwan University of Science and Technology (NTUST), Taipei, Taiwan, R.O.C., in 2003, his MS degree from the Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2005, all in Mechanical Engineering. His current research interests include metrology system integration.

         , Hao-Wei Yang

    Hao-Wei Yang received his BS degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2012. His current research interests include nanometrology and machine tool metrology.

         and Li-Min Chen

    Li-Min Chen received his BS degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2010. His current research interests include nanometrology and machine tool metrology.
Published/Copyright: August 6, 2014
Become an author with De Gruyter Brill
Author Information
Advanced Optical Technologies
From the journal Advanced Optical Technologies Volume 3 Issue 4

Abstract

Any axis of precision machines possesses six-degree-of-freedom (6-DOF) motion errors, also called the geometric errors, due to manufacturing tolerances and assembly errors, namely three linear and three angular errors. Conventional optical instruments allow measurement of only one or two errors at a time. In order to achieve fast measurement, many multi-degree-of-freedom measurement (MDFM) systems have been developed over the past 20 years, from three-degree-of-freedom (3-DOF) to 6-DOF. This article summarizes reports of optical measurement techniques of MDFM systems for precision linear, planar and XYZ stages. Comments are also given for the applicability to practical uses.

Keywords: diffraction grating; laser interferometer; linear motion; multi-degree-of-freedom measurement; planar motion
Corresponding author: Kuang-Chao Fan, Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, Phone: +886-2-2362-0032, e-mail:

About the authors

Kuang-Chao Fan

Kuang-Chao Fan was born in Taiwan, R.O.C., on January 4, 1950. He received his BSc degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 1972, his MSc degree from the Status University of New York at Buffalo, in 1976, and his PhD degree from the University of Manchester Institute of Science and Technology, Manchester, U.K., in 1984, all in Mechanical Engineering. He has been a Professor of Mechanical Engineering at NTU since August 1989. He was the Chairman of the Institute of Industrial Engineering, NTU, the Chairman of Chinese Institute of Automation Technology, the Director of the Tjing Ling Industrial Research Institute, and Associate Dean of the Engineer College, NTU. Since 2001, he has been the Yangtze Professor at Hefei University of Technology, Hefei, China. His current research interests include manufacturing metrology, precision machining, machine tool technology, micro/nanomeasurement, optical switches, and tactile sensor.

Hung-Yu Wang

Hung-Yu Wang was born in Taiwan, R.O.C., on September 22, 1981. He received his BS degree from Nation Taiwan University of Science and Technology (NTUST), Taipei, Taiwan, R.O.C., in 2003, his MS degree from the Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2005, all in Mechanical Engineering. His current research interests include metrology system integration.

Hao-Wei Yang

Hao-Wei Yang received his BS degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2012. His current research interests include nanometrology and machine tool metrology.

Li-Min Chen

Li-Min Chen received his BS degree from Nation Taiwan University (NTU), Taipei, Taiwan, R.O.C., in 2010. His current research interests include nanometrology and machine tool metrology.

References

[1] E. Abbe, Zeitschrift für Instrumentenkunde. 10, 446–448 (1890).Search in Google Scholar

[2] J. B. Bryan, Precis. Eng. 1, 129–132 (1979).Search in Google Scholar

[3] G. Schelesinger, F. Koenigsberger and M. Burdekin, in ‘Testing machine tools’, 8th edition (1978).Search in Google Scholar

[4] R. J. Hocken, in ‘Technology of Machine Tool, Vol. 5: Machine Tool Accuracy’, (Lawrence Livermore National Lab., California, 1980).Search in Google Scholar

[5] ISO 230-1, in ‘Test code for machine tools- Part 1’, (ISO, Geneva, 2012).Search in Google Scholar

[6] ISO 230-2, in ‘Test code for machine tools- Part 2’, (ISO, Geneva, 2014).Search in Google Scholar

[7] ISO 10360, in ‘Acceptance and re-verification tests for Coordinate Measuring Machines’, (ISO, Geneva, 2000).Search in Google Scholar

[8] R. C. Quenelle and L. J. Wuerz, Hewlett Packard J. 3, 3–4 (1983).Search in Google Scholar

[9] H. Schwenke, U. Neuschaefer Rube, T. Pfeifer and H. Kunzmann, CIRP Ann-Manuf. Techn. 51, 685–699 (2002).10.1016/S0007-8506(07)61707-7Search in Google Scholar

[10] W. T. Estler, K. L. Edmundson, G. N. Peggs and D. H. Parker, CIRP Ann-Manuf. Techn. 51, 587–609 (2002).Search in Google Scholar

[11] A. H. Slocum, in ‘Precision Machine Design’, (Prentice-Hall, New Jersey, 1992).Search in Google Scholar

[12] S. Shimizu and H.-S. Lee, Int. J. Japan Soc. Prec. Eng. 28, 273–274 (1994).Search in Google Scholar

[13] P. S. Huang and J. Ni, Int. J. Mach. Tools Manufact. 35, 725–738 (1995).Search in Google Scholar

[14] A. Teimel, Precis. Eng. 14, 147–154 (1992).Search in Google Scholar

[15] B. Edlen, Metrologia. 2, 71–80 (1966).10.1088/0026-1394/2/2/002Search in Google Scholar

[16] K. P. Birch and M. J. Downs, Metrologia. 30, 155–162 (1993).Search in Google Scholar

[17] N. Bobroff, Meas. Sci. Technol. 4, 907–926 (1993).Search in Google Scholar

[18] M. L. Schattenburg and H. I. Smith, Proc. SPIE 4608, 116–124 (2002).Search in Google Scholar

[19] J. A. Kim, K. C. Kim, E. W. Bae, S. Kim and Y. K. Kwak, Rev. Sci. Instrum. 71, 3214–3219 (2000).Search in Google Scholar

[20] C. B. Lee and S. K. Lee, J. Mech. Sci. Technol. 27, 141–152 (2013).Search in Google Scholar

[21] W. Gao, in ‘Precision Nanometrology’, (Springer, New York, 2010) pp. 56–140.10.1007/978-1-84996-254-4Search in Google Scholar

[22] H. Büchner and G. Jaeger, Meas. Sci. Technol. 17, 746–752 (2006).Search in Google Scholar

[23] X. Liu, W. Clegg, D. F. L. Jenkins and B. Liu, IEEE T Instrum Meas. 50, 868–871 (2001).Search in Google Scholar

[24] S. Topcu, T. Chassagne, Y. Alayli and P. Juncar, Opt. Commun. 247, 133–139 (2005).10.1016/j.optcom.2004.11.040Search in Google Scholar

[25] C. F. Kao, S. H. Lu, H. M. Shen and K. C. Fan, Japanese J. Appl. Phys. 47, 1833–1837 (2008).Search in Google Scholar

[26] F. Cheng and K. C. Fan, Appl. Opt. 50, 4550–4556 (2011).Search in Google Scholar

[27] C. C. Wu, C. C. Hsu, J. Y. Lee, Y. Z. Chen and J. S. Yang, Opt. Commun. 297, 89–97 (2013).Search in Google Scholar

[28] D. Lin, H. Jiang and C. Yin, Opt. Laser Technol. 32, 95–99 (2000).10.1016/S0030-3992(00)00022-0Search in Google Scholar

[29] C. C. Hsu, Y. Y. Sung, Z. R. Lin and M. C. Kao, Opt. Laser Technol. 48, 200–205 (2013).Search in Google Scholar

[30] H. L. Hsieh, J. Y. Lee, W. T. Wu, J. C. Chen, R. Deturche et al., Meas Sci. Technol. 21 (2010).10.1088/0957-0233/21/11/115304Search in Google Scholar

[31] J. Y. Lee and M. P. Lu, Opt Commun. 284, 857–862 (2011).Search in Google Scholar

[32] C. C. Wu, C. C. Hsu, J. Y. Lee and Y. Z. Chen, Opt. Express 21, 13322–13332 (2013).10.1364/OE.21.013322Search in Google Scholar PubMed

[33] C. C. Wu, J. S. Yang, C. Y. Cheng and Y. Z. Chen, Sensor Actuat A-Phys. 189, 86–92 (2013).Search in Google Scholar

[34] J. Y. Lee and G. A. Jiang, Opt. Express. 21, 25553–25564 (2013).Search in Google Scholar

[35] K. Akihide, G. Wei and L. Zeng, Meas Sci. Technol. 21, 054005 (2010).Search in Google Scholar

[36] A. Kimura, W. Gao, Y. Arai and Z. Lijiang, Precis Eng. 34, 145–155 (2010).10.1016/j.precisioneng.2009.05.008Search in Google Scholar

[37] C. C. Wu, Y. Z. Chen and C. H. Liao, Opt. Express. 21, 18872–18883 (2013).Search in Google Scholar

[38] K. C. Fan, B. C. Lee and Y. C. Chung, Int. J. Autom. Smart Technol. 1, 93–99 (2011).Search in Google Scholar

[39] R. R. Baldwin, U.S. patent 3,790,284. (1974).10.1111/j.1939-0025.1974.tb01157.xSearch in Google Scholar PubMed

[40] J. Zhang and L. Cai, Opt. Eng. 37, 1785–1789 (1998).Search in Google Scholar

[41] C. M. Wu, Appl. Opt. 43, 3812–3816 (2004).Search in Google Scholar

[42] C. Qianghua, L. Dejiao, W. Jian, Y. Juqun and Y. Chunyong, Meas Sci. Technol. 16, 2030 (2005).Search in Google Scholar

[43] K. C. Fan and Y. Zhao, Int. J. Mach. Tools Manufact. 40, 2073–2081 (2000).Search in Google Scholar

[44] Q. Feng, B. Zhang and C. Kuang, Opt. Laser Technol. 36, 279–283 (2004).10.1016/j.optlastec.2003.09.016Search in Google Scholar

[45] P. Shi and E. Stijns, Appl. Opt. 27, 4342–4344 (1988).Search in Google Scholar

[46] M. Ikram and G. Hussain, Appl. Opt. 38, 113–120 (1999).Search in Google Scholar

[47] F. Cheng and K. C. Fan, Phys. Procedia 19, 3–8 (2011).Search in Google Scholar

[48] G. Jaeger and E. Manske, 7th Int. Symp. on Laser Metrology, pp. 755–762 (2002).Search in Google Scholar

[49] F. J. Schuda, Rev. Sci. Instrum. 54, 1648–1652 (1983).Search in Google Scholar

[50] P. R. Yoder Jr, E. R. Schlesinger and J. L. Chickvary, Appl. Opt. 14, 1890–1895 (1975).Search in Google Scholar

[51] A. V. Kirsanov, T. V. Barmashova, V. V. Zelenogorskii and A. K. Potemkin, Instrum Exp Tech. 52, 141–143 (2009).Search in Google Scholar

[52] W. Gao, Y. Saito, H. Muto, Y. Arai and Y. Shimizu, CIRP Ann-Manuf Techn. 60, 515–518 (2011).10.1016/j.cirp.2011.03.052Search in Google Scholar

[53] J. Galyer and C. Shotbot, in ‘Metrology for Engineers’ (Cassell, East Sussex, 4th ed. 1983) pp. 76–78.Search in Google Scholar

[54] J. C. Tsai, US patent 6316779 B1 (2001).Search in Google Scholar

[55] H. Jiang and C. Y. Yin, Opt. Eng. 39, 516–519 (2000).Search in Google Scholar

[56] Y. Zhai, Q. Feng and B. Zhang, Opt. Laser Technol. 44, 839–843 (2012).10.1016/j.optlastec.2011.11.021Search in Google Scholar

[57] L. C. Maxey, US patent 6327038 B1 (2001).Search in Google Scholar

[58] K. C. Lau, US patent 7027162 B2 (2006).10.1016/S1351-4180(06)71591-4Search in Google Scholar

[59] J. W. Kim, C. S. Kang, J. A. Kim, T. Eom, M. Cho, et al., Opt. Express. 15, 15759–15766 (2007).Search in Google Scholar

[60] H. L. Huang, C. H. Liu, W. Y. Jywe and M. S. Wang, P I Mech. Eng. B-J Eng. 223, 107–114 (2009).Search in Google Scholar

[61] H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang and T. H. Fang, Rev. Sci. Instrum. 78 (2007).10.1063/1.2743165Search in Google Scholar PubMed

[62] W. Gao, Y. Saito, H. Muto, Y. Arai and Y. Shimizu, CIRP Ann-Manuf. Techn. 60, 515–518 (2011).10.1016/j.cirp.2011.03.052Search in Google Scholar

[63] Y. Saito, Y. Arai and W. Gao, Sensor Actuat. A: Phys. 150, 175–183 (2009).10.1016/j.sna.2008.12.019Search in Google Scholar

[64] K. Tenjimbayashi, US patent 6559955 B2 (2003).Search in Google Scholar

[65] C. Kuang, Q. Feng, B. Zhang, B. Liu, S. Chen, et al., Sensor Actuat. A-Phys. 125, 100–108 (2005).10.1016/j.sna.2005.05.022Search in Google Scholar

[66] P. Huang and J. Ni, US patent 5418611 A (1995).Search in Google Scholar

[67] C. H. Liu, W. Y. Jywe and C. K. Chen, Int. J. Adv. Manuf. Tech. 26, 808–813 (2005).Search in Google Scholar

[68] C. H. Liu, W. Y. Jywe, C. K. Chen, W. H. Hsien, L. H. Shyu, et al., J. Phys. Conference Series 48, 196–201 (2006).10.1088/1742-6596/48/1/036Search in Google Scholar

[69] H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang, Y. R. Jeng, et al., P I Mech. Eng. B-J Eng. 224, 37–50 (2010).Search in Google Scholar

[70] P. S. Huang, US patent 5900938 A (1999).Search in Google Scholar

[71] C. H. Liu, W. Y. Jywe, I. C. Chen, L. L. Duan, H. H. Jwo, et al., Tech. Mess. 76, 245–247 (2009).Search in Google Scholar

[72] W. Y. Jywe, C. H. Liu, W. H. Shien, L. H. Shyu, T. H. Fang, et al., J. Phys. Conference Series 48, 761–765 (2006).10.1088/1742-6596/48/1/144Search in Google Scholar

[73] C. Kuang, E. Hong and J. Ni, Rev. Sci. Instrum. 78, 0950105 (2007).Search in Google Scholar

[74] P. Huang, Y. Li, H. Wei, L. Ren and S. Zhao, Appl. Opt. 52, 6607–6615 (2013).Search in Google Scholar

[75] C. H. Liu, H. L. Huang and H. W. Lee, Appl. Opt. 48, 2767–2777 (2009).Search in Google Scholar

[76] S. W. Lee, R. Mayor and J. Ni, J Manuf. Sci. E-T Asme. 127, 857–865 (2005).Search in Google Scholar

[77] W. Wang, S. H. Kweon, C. S. Hwang, N. C. Kang, Y. S. Kim et al., Int. J. Adv. Manuf. Tech. 43, 701–709 (2009).10.1007/s00170-008-1743-7Search in Google Scholar

[78] K. C. Fan, M. J. Chen and W. M. Huang, Int. J. Mach. Tool Manu. 38, 155–164 (1998).Search in Google Scholar

[79] K.C. Lau, US patent US6049377 (2000).Search in Google Scholar

[80] Q. Feng, B. Zhang, C. Cui, C. Kuang, Y. Zhai, et al., Opt. Express 21, 28506 (2013).Search in Google Scholar

[81] C. Lee, G. H. Kim and S. K. Lee, Meas. Sci. Technol. 22 (2011).10.1088/0957-0233/22/10/105901Search in Google Scholar

[82] C. H. Liu, W. Y. Jywe, Y. R. Jeng, T. H. Hsu and Y. T. Li, Precis. Eng. 34, 497–506 (2010).Search in Google Scholar

[83] H. Shinno, H. Yoshioka, T. Gokan and H. Sawano, CIRP Ann-Manuf. Technol. 59, 525–528 (2010).10.1016/j.cirp.2010.03.022Search in Google Scholar

[84] J. C. Shen, W. Y. Jywe and C. H. Wu, Precis. Eng. 38, 391–397 (2014).Search in Google Scholar

[85] W. Gao, S. Dejima and S. Kiyono, Sensors Actuat., A: Phys. 117, 95–102 (2005).10.1016/j.sna.2004.06.004Search in Google Scholar

[86] W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono, et al., Precis. Eng. 28, 329–337 (2004).10.1016/j.precisioneng.2003.12.003Search in Google Scholar

[87] A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, et al., Precis. Eng. 36, 576–585 (2012).10.1016/j.precisioneng.2012.04.005Search in Google Scholar

[88] W. Jywe, Y. R. Jeng, C. H. Liu and Y. F. Teng, P I Mech. Eng. B-J Eng. 223, 443–448 (2009).Search in Google Scholar

[89] K. C. Fan and M. J. Chen, Precis. Eng. 24, 15–23 (2000).Search in Google Scholar

[90] Z. Gao, J. Hu, Y. Zhu and G. Duan, Precis. Eng. 37, 606–620 (2013).10.1016/j.precisioneng.2013.01.006Search in Google Scholar

[91] J. A. Kim, K. C. Kim, E. W. Bae, S. Kim and Y. K. Kwak, Rev. Sci. Instrum. 71, 3214–3219 (2000).Search in Google Scholar

[92] J. A. Kim, E. W. Bae, S. H. Kim and Y. K. Kwak, Precis. Eng. 26, 99–104 (2002).Search in Google Scholar

[93] E. W. Bae, J. A. Kim and S. H. Kim, Meas. Sci. Technol. 12, 1495–1502 (2001).Search in Google Scholar

[94] G. Zhang, R. Veale, B. Charlton, B. Borchardt and R. Hocken, Annals of the CIRP, 34/1, 445–448 (1985).10.1016/S0007-8506(07)61808-3Search in Google Scholar

[95] K. Lau, R. Hocken and W. C. Haight, Precis. Eng. 8, 3–8 (1986).10.1016/0141-6359(86)90002-4Search in Google Scholar

[96] K. C. Lau, US patent 0176270 A1 (2010).Search in Google Scholar

[97] E. B. Hughes, A. Wilson and G. N. Peggs, Annals of the CIRP, 49/1, 391–394 (2000).10.1016/S0007-8506(07)62972-2Search in Google Scholar

[98] H. Schwenke, M. Franke, J. Hannaford and H. Kunzmann, Annals of the CIRP, 54/1, 475–478 (2005).10.1016/S0007-8506(07)60148-6Search in Google Scholar

[99] eTALON AG, http://www.etalon-ag.com.Search in Google Scholar

[100] H. Schwenke, R. Schmitt, P. Jatzkowski and C. Warmann, Annals of CIRP, 58/1, 477–480 (2009).10.1016/j.cirp.2009.03.007Search in Google Scholar

Received: 2014-6-13
Accepted: 2014-7-14
Published Online: 2014-8-6
Published in Print: 2014-8-1

©2014 THOSS Media & De Gruyter

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News from the European Optical Society
  4. Conference Notes
  5. Conference Calendar
  6. Topical issue: Optical metrology for precision engineering
  7. Editorial
  8. Optical metrology for precision engineering
  9. Review Article
  10. Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
  11. Research Articles
  12. Miniaturization of an interferometric distance sensor employing diffractive optics
  13. Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
  14. Single shot interferometry using a two-interferogram phase shifting algorithm
  15. Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
  16. Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
  17. Lateral resolution improvement of laser-scanning imaging for nano defects detection
  18. Letters
  19. Three-axis vibration measurement by using a grating-interferometric vibrometer
  20. Fast and accurate deflectometry with crossed fringes
  21. Review Article
  22. Material and technology trends in fiber optics
https://doi.org/10.1515/aot-2014-0038
Keywords for this article
diffraction grating; laser interferometer; linear motion; multi-degree-of-freedom measurement; planar motion

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News from the European Optical Society
  4. Conference Notes
  5. Conference Calendar
  6. Topical issue: Optical metrology for precision engineering
  7. Editorial
  8. Optical metrology for precision engineering
  9. Review Article
  10. Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
  11. Research Articles
  12. Miniaturization of an interferometric distance sensor employing diffractive optics
  13. Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
  14. Single shot interferometry using a two-interferogram phase shifting algorithm
  15. Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
  16. Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
  17. Lateral resolution improvement of laser-scanning imaging for nano defects detection
  18. Letters
  19. Three-axis vibration measurement by using a grating-interferometric vibrometer
  20. Fast and accurate deflectometry with crossed fringes
  21. Review Article
  22. Material and technology trends in fiber optics
Sign up now to receive a 20% welcome discount
Institutional Access
How does access work?
Have an idea on how to improve our website?
Please write us.
© 2025 De Gruyter Brill
Downloaded on 3.10.2025 from https://www.degruyterbrill.com/document/doi/10.1515/aot-2014-0038/html?lang=en
Scroll to top button