Home Miniaturization of an interferometric distance sensor employing diffractive optics
Article
Licensed
Unlicensed Requires Authentication

Miniaturization of an interferometric distance sensor employing diffractive optics

  • Nektarios Koukourakis

    Nektarios Koukourakis studied electrical engineering at the Ruhr-University in Bochum, Germany. He received his diploma degree in 2008 and his PhD degree in 2012. Since 2013 he is with the Laboratory for Measurement and Testing Techniques at the Technische Universität, Dresden. His current research areas are the development of novel optical measurement systems for surface analysis and biomedicine, based on interferometry, holography and novel microscopic approaches.

    EMAIL logo
    , Robert Kuschmierz

    Robert Kuschmierz received his diploma degree in electrical engineering in 2012 from the Technische Universität Dresden, Germany. Since 2012, he is working in the group of measurement system techniques at the Laboratory for Measurement and Testing Techniques. His main research areas are the development, characterization and application of laser-based measurement systems for shape and vibration measurements in production engineering as well as in non-destructive testing for turbo machinery.

    , Michael Bohling

    Michael Bohling received his Diploma degree in applied physics from the University of Applied Sciences in Emden, Germany, in 1988, and his MSc degree in photonics from the University of Hagen, Germany. In 2012 he received his PhD degree in electrical engineering from the University of Hagen. Between 1990 and 2003 he was with several laser material processing companies, eventually in the position of CEO. He is currently a research assistant in the Micro- and Nanophotonics group with the University of Hagen.

    , Jürgen Jahns

    Jürgen Jahns received his diploma and doctorate in physics from the University of Erlangen-Nuremberg, Germany, in 1978 and 1982, respectively. He worked at Siemens, Munich, Germany, and at AT&T Bell Laboratories, Holmdel, New Jersey, before becoming Full Professor and Chair of Optical Information Technology at the FernUniversitat in Hagen, Germany, in 1994 (now: Chair of Micro- and Nanophotonics). He has co-authored more than 95 journal articles and several books on microoptics and photonics. Jahns is a Fellow of OSA and SPIE and a member of DGaO, EOS, and IEEE.

    , Andreas Fischer

    Andreas Fischer received his diploma degree in electrical engineering in 2004 and his PhD degree in 2009 from the Technische Universität Dresden, Germany. Since 2009, he is the head of the group of measurement system techniques at the Laboratory for Measurement and Testing Techniques. His main research areas are the identification, characterization and application of measurement limits as well as the development of optical flow and surface measurement systems.

    and Jürgen W. Czarske

    Jürgen Czarske studied electrical engineering and physics at the Universität Hannover, where he received his PhD in 1995 and the venia legendi in 2003. Between 1995 and 2004, he was with the Laser Zentrum Hannover e.V. and, since 2004, he has been Professor for Measurement and Testing Techniques at the Technische Universität Dresden. His current research activities focus on developing novel optical and ultrasonic sensors for investigating fluid flows as well as the dynamic behavior of solid objects.

Published/Copyright: August 6, 2014
Become an author with De Gruyter Brill

Abstract

In order to improve safety, lifetime and energy efficiency of turbo machines, the behavior of the turbine blades has to be monitored during operation. This is a great challenge for metrology, since small, robust and non-contact position measurement techniques are required that offer both micrometer accuracy and microsecond temporal resolution. The Laser-Doppler-Distance (LDD) -Sensor proved to be an adequate technique to perform such measurements. However, the usage in turbo machines requires a miniaturized and temperature-stable sensor-head. In this paper we introduce a miniaturized design of the LDD-sensor that is based on common-path detection. First results indicated that the numerical aperture of the common-path detection is small in comparison to former implementations that used separate paths for illumination and detection. We find that decreasing the numerical aperture strongly increases the systematic measurement uncertainty. For this purpose a novel diffractive optical element containing a diffracting-lens was designed and used to increase the numerical aperture of the common-path detection without affecting the sensor size. Experiments prove that the new element reduces the relative systematic measurement uncertainty by a factor of ten. The mean systematic position measurement uncertainty amounts to Δzmean≈16 μm. The resulting sensor has dimensions of 25×25×60 mm3, offers temperature-stability and achieves micrometer resolution.


Corresponding author: Nektarios Koukourakis, Laboratory for Measurement and Testing Techniques, TU Dresden, 01062 Dresden, Germany, e-mail:

About the authors

Nektarios Koukourakis

Nektarios Koukourakis studied electrical engineering at the Ruhr-University in Bochum, Germany. He received his diploma degree in 2008 and his PhD degree in 2012. Since 2013 he is with the Laboratory for Measurement and Testing Techniques at the Technische Universität, Dresden. His current research areas are the development of novel optical measurement systems for surface analysis and biomedicine, based on interferometry, holography and novel microscopic approaches.

Robert Kuschmierz

Robert Kuschmierz received his diploma degree in electrical engineering in 2012 from the Technische Universität Dresden, Germany. Since 2012, he is working in the group of measurement system techniques at the Laboratory for Measurement and Testing Techniques. His main research areas are the development, characterization and application of laser-based measurement systems for shape and vibration measurements in production engineering as well as in non-destructive testing for turbo machinery.

Michael Bohling

Michael Bohling received his Diploma degree in applied physics from the University of Applied Sciences in Emden, Germany, in 1988, and his MSc degree in photonics from the University of Hagen, Germany. In 2012 he received his PhD degree in electrical engineering from the University of Hagen. Between 1990 and 2003 he was with several laser material processing companies, eventually in the position of CEO. He is currently a research assistant in the Micro- and Nanophotonics group with the University of Hagen.

Jürgen Jahns

Jürgen Jahns received his diploma and doctorate in physics from the University of Erlangen-Nuremberg, Germany, in 1978 and 1982, respectively. He worked at Siemens, Munich, Germany, and at AT&T Bell Laboratories, Holmdel, New Jersey, before becoming Full Professor and Chair of Optical Information Technology at the FernUniversitat in Hagen, Germany, in 1994 (now: Chair of Micro- and Nanophotonics). He has co-authored more than 95 journal articles and several books on microoptics and photonics. Jahns is a Fellow of OSA and SPIE and a member of DGaO, EOS, and IEEE.

Andreas Fischer

Andreas Fischer received his diploma degree in electrical engineering in 2004 and his PhD degree in 2009 from the Technische Universität Dresden, Germany. Since 2009, he is the head of the group of measurement system techniques at the Laboratory for Measurement and Testing Techniques. His main research areas are the identification, characterization and application of measurement limits as well as the development of optical flow and surface measurement systems.

Jürgen W. Czarske

Jürgen Czarske studied electrical engineering and physics at the Universität Hannover, where he received his PhD in 1995 and the venia legendi in 2003. Between 1995 and 2004, he was with the Laser Zentrum Hannover e.V. and, since 2004, he has been Professor for Measurement and Testing Techniques at the Technische Universität Dresden. His current research activities focus on developing novel optical and ultrasonic sensors for investigating fluid flows as well as the dynamic behavior of solid objects.

Acknowledgments

The authors thank the Deutsche Forschungsgemeinschaft (DFG) for their financial support (project Cz 55/23-1). We also acknowledge the work of Thomas E. Seiler and Boguslaw Wdowiak, University of Hagen.

References

[1] R. Kuschmierz, A. Filippatos, A. Langkamp, W. Hufenbach, J. W. Czarske, et al., SPIE Proc. 90620O-90620O-7 (2014).Search in Google Scholar

[2] D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, et al., Science 254, 1178–1181 (1991).10.1126/science.1957169Search in Google Scholar PubMed PubMed Central

[3] R. H. Webb, Rep. Prog. Phys. 59, 427–471 (1996).Search in Google Scholar

[4] R. G. Dorsch, G. Häusler and J. M. Herrmann, Appl. Opt. 337, 1306–1314 (1994).Search in Google Scholar

[5] A. Kempe, S. Schlamp, T. Rösgen and K. Haffner, Opt. Lett. 28, 1323–1325 (2003).10.1364/OL.28.001323Search in Google Scholar

[6] Y. W. Lai, N. Koukourakis, N. C. Gerhardt, M. R. Hofmann, R. Meyer, et al., J. Microelectromechanical Sys. 19, 1175–1179 (2010).Search in Google Scholar

[7] T. Pfister, L. Büttner and J. Czarske, Meas. Sci. Tech. 16, 627–641 (2005).10.1088/0957-0233/16/3/003Search in Google Scholar

[8] F. Dreier, P. Günther, T. Pfister, J. Czarske, A. Fischer, IEEE T. Instrum. Meas. 62, 8 (2013).10.1109/TIM.2013.2255993Search in Google Scholar

[9] P. Günther, F. Dreier, T. Pfister, J. Czarske, T. Haupt, et al., Meach. Syst. A. Sig. Proc. 25, 319–330 (2011).10.1016/j.ymssp.2010.08.005Search in Google Scholar

[10] T. Pfister, P. Günther, F. Dreier, J. Czarske, J. Eng. Gas Turb. Power 134, 012504-1–012504-7, (2011).10.1115/1.4004160Search in Google Scholar

[11] F. Dreier, T. Pfister and J. Czarske, Proc. Of ASME Turbo Expo in Copenhagen, Denmark. GT2012-69540 (2012).Search in Google Scholar

[12] J. Schmidt, R. Völkel, W. Stork, J.T. Sheridan, J. Schwider, et al., Opt. Lett. 17, 1240–1242 (1992).10.1364/OL.17.001240Search in Google Scholar PubMed

[13] Y. Zhu, Z. Huang, F. Shen and A. Wang, Opt. Lett. 30, 711–713 (2005).10.1364/OL.30.000711Search in Google Scholar PubMed

[14] J. W. Goodman, JOSA 66, 11, 1145–1150 (1976).10.1364/JOSA.66.001145Search in Google Scholar

[15] R. Kliese and A. D. Rakic, Opt. Express 20, 18757–18771 (2012).10.1364/OE.20.018757Search in Google Scholar PubMed

[16] J. Jahns, S. Helfert, ‘Introduction to Micro- and Nanooptics’, Wiley VCH Weinheimt ch.6 (2012).Search in Google Scholar

Received: 2014-4-23
Accepted: 2014-6-27
Published Online: 2014-8-6
Published in Print: 2014-8-1

©2014 THOSS Media & De Gruyter

Downloaded on 7.9.2025 from https://www.degruyterbrill.com/document/doi/10.1515/aot-2014-0033/pdf
Scroll to top button