Fast and accurate deflectometry with crossed fringes
-
Yuankun Liu
,
Evelyn Olesch
Abstract
Phase measuring deflectometry (PMD) acquires the two components of the local surface gradient via a sequence of two orthogonal sinusoidal fringe patterns that have to be displayed and captured separately. We will demonstrate that the sequential process (different fringe directions, phase shifting) can be completely avoided by using a cross fringe pattern. With an optimized Fourier evaluation, high quality data of smooth optical surfaces can be acquired within one single shot. The cross fringe pattern allows for one more improvement of PMD: we will demonstrate a novel phase-shift technique, where a one-dimensional N-phase shift allows for the acquisition of the two orthogonal phases, with only N exposures instead of 2N exposures. Therefore, PMD can be implemented by a one-dimensional translation of the fringe pattern, instead of the common two-dimensional translation, which is quite useful for certain applications.
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©2014 THOSS Media & De Gruyter
Articles in the same Issue
- Cover and Frontmatter
- Community
- News from the European Optical Society
- Conference Notes
- Conference Calendar
- Topical issue: Optical metrology for precision engineering
- Editorial
- Optical metrology for precision engineering
- Review Article
- Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
- Research Articles
- Miniaturization of an interferometric distance sensor employing diffractive optics
- Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
- Single shot interferometry using a two-interferogram phase shifting algorithm
- Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
- Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
- Lateral resolution improvement of laser-scanning imaging for nano defects detection
- Letters
- Three-axis vibration measurement by using a grating-interferometric vibrometer
- Fast and accurate deflectometry with crossed fringes
- Review Article
- Material and technology trends in fiber optics
Articles in the same Issue
- Cover and Frontmatter
- Community
- News from the European Optical Society
- Conference Notes
- Conference Calendar
- Topical issue: Optical metrology for precision engineering
- Editorial
- Optical metrology for precision engineering
- Review Article
- Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines
- Research Articles
- Miniaturization of an interferometric distance sensor employing diffractive optics
- Wavelength-modulated heterodyne grating shearing interferometry for precise displacement measurement
- Single shot interferometry using a two-interferogram phase shifting algorithm
- Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry
- Fundamental validation for surface texture imaging using a microsphere as a laser-trapping-based microprobe
- Lateral resolution improvement of laser-scanning imaging for nano defects detection
- Letters
- Three-axis vibration measurement by using a grating-interferometric vibrometer
- Fast and accurate deflectometry with crossed fringes
- Review Article
- Material and technology trends in fiber optics
