Home Physical Sciences INFRARED LASER-INDUCED DECOMPOSITION OF tert-BUTYLSILANE FOR CHEMICAL VAPOUR DEPOSITION OF Si/C/H PHASES
Article Open Access

INFRARED LASER-INDUCED DECOMPOSITION OF tert-BUTYLSILANE FOR CHEMICAL VAPOUR DEPOSITION OF Si/C/H PHASES

  • , , , , and
Published/Copyright: September 1, 1999

Published Online: 1999-09

©2011 by Walter de Gruyter GmbH & Co.

Downloaded on 18.3.2026 from https://www.degruyterbrill.com/document/doi/10.1515/MGMC.1999.22.9.545/html
Scroll to top button