Home INFRARED LASER-INDUCED DECOMPOSITION OF tert-BUTYLSILANE FOR CHEMICAL VAPOUR DEPOSITION OF Si/C/H PHASES
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INFRARED LASER-INDUCED DECOMPOSITION OF tert-BUTYLSILANE FOR CHEMICAL VAPOUR DEPOSITION OF Si/C/H PHASES

  • Josef Pola, , Josef Vtek, , Zdenk Basti, , Radek Fajgar, , Susanne Graschy, and Karl Hassler,
Published/Copyright: September 1, 1999

Published Online: 1999-09

©2011 by Walter de Gruyter GmbH & Co.

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