An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification

Xue-jin Lia,; Cheng-jun Qiu,; Yuan-long Deng,; Wei Qu,; Jun-nan He,

doi:10.1515/IJNSNS.2010.11.3.225

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An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification

Xue-jin Lia, , Cheng-jun Qiu, , Yuan-long Deng, , Wei Qu, and Jun-nan He,

Published/Copyright: March 1, 2010

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From the journal International Journal of Nonlinear Sciences and Numerical Simulation Volume 11 Issue 3

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Lia,, Xue-jin, Qiu,, Cheng-jun, Deng,, Yuan-long, Qu,, Wei and He,, Jun-nan. "An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification" International Journal of Nonlinear Sciences and Numerical Simulation, vol. 11, no. 3, pp. 225-229. https://doi.org/10.1515/IJNSNS.2010.11.3.225

Lia,, X., Qiu,, C., Deng,, Y., Qu,, W. & He,, J. (). An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification. International Journal of Nonlinear Sciences and Numerical Simulation, 11(3), 225-229. https://doi.org/10.1515/IJNSNS.2010.11.3.225

Lia,, X., Qiu,, C., Deng,, Y., Qu,, W. and He,, J. () An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification. International Journal of Nonlinear Sciences and Numerical Simulation, Vol. 11 (Issue 3), pp. 225-229. https://doi.org/10.1515/IJNSNS.2010.11.3.225

Lia,, Xue-jin, Qiu,, Cheng-jun, Deng,, Yuan-long, Qu,, Wei and He,, Jun-nan. "An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification" International Journal of Nonlinear Sciences and Numerical Simulation 11, no. 3 (): 225-229. https://doi.org/10.1515/IJNSNS.2010.11.3.225

Lia, X, Qiu, C, Deng, Y, Qu, W, He, J. An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification. International Journal of Nonlinear Sciences and Numerical Simulation. ;11(3): 225-229. https://doi.org/10.1515/IJNSNS.2010.11.3.225

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An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification

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https://doi.org/10.1515/IJNSNS.2010.11.3.225

Articles in the same Issue

CONTENTS
Statistical Description and Forecasting Analysis of Life System
Using Linear Difference Equations to Model Nonlinear Cryptographic Sequences
Modified Lindstedt-Poincare Method with Multiple Time Scales for Combination Resonance of Damped Dynamical Systems with Strong Non-Linearities
Vibrations of a Heavy Mass Particle Moving along a Rough Line with Friction of Coulomb Type
Vibro-impact of a Heavy Mass Particle Moving along a Rough Circle with Two Impact Limiters
An MEMS Optical Fiber Pressure Sensor Based on a Square Silicon Diaphragm: Numerical Simulation and Experimental Verification