Home A Bulk Micromachined MEMS Digital Distributed Phase Shifter Based on Metal-Air-Metal Capacitors Formed by Intrinsic Stress
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A Bulk Micromachined MEMS Digital Distributed Phase Shifter Based on Metal-Air-Metal Capacitors Formed by Intrinsic Stress

  • Min Miao, , Guoying Wu, , Yufeng Jin, , Jinwen Zhang, and Yilong Hao,
Published/Copyright: December 1, 2005

Published Online: 2005-12

©2011 by Walter de Gruyter GmbH & Co.

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