Article
Publicly Available
"Simple" diagnostics for characterization of low-pressure chemically active plasmas
-
D. K. Otorbaev
Published/Copyright:
January 1, 2009
Published Online: 2009-01-01
Published in Print: 2002-01-01
© 2013 Walter de Gruyter GmbH, Berlin/Boston
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Articles in the same Issue
- Energy transfers by long-lived species in glows and afterglows
- New approaches in thermal plasma technology
- Nonequilibrium discharges in air and nitrogen plasmas at atmospheric pressure
- Plasma sterilization. Methods and mechanisms
- Plasma production of nanocrystalline silicon particles and polymorphous silicon thin films for large-area electronic devices
- Plasma processing and chemistry
- Study for plasma etching of dielectric film in semiconductor device manufacturing. Review of ASET research project
- Diagnostics of etching plasmas
- Role of ions in SiO2 deposition with pulsed and continuous helicon plasmas
- Diagnostics and insights on PECVD for gas-barrier coatings
- Plasma-assisted production of hydrogen from hydrocarbons
- Ion-induced damage and annealing of silicon. Molecular dynamics simulations
- Plasma treatment of textile fibers
- Generation of thermal plasmas in liquid-stabilized and hybrid dc-arc torches
- Nonthermal and nonequilibrium effects in high-power pulsed ICP and application to surface modification of materials
- Splat formation in plasma-spray coating process
- Ultrashort pulsed barrier discharges and applications
- "Simple" diagnostics for characterization of low-pressure chemically active plasmas
- Comparative characterization of high-density plasma reactors using emission spectroscopy from VUV to NIR
- Excilamps as efficient UVVUV light sources
- Plasma synthesis of catalytic thin films
- Superhard nanocomposite coatings. From basic science toward industrialization
- Clustering phenomena in low-pressure reactive plasmas. Basis and applications
- How to exploit ion-induced stress relaxation to grow thick c-BN films
- Definitions of basic terms relating to polymer liquid crystals (IUPAC Recommendations 2001)
- Provisional Nomenclature Recommendations