Home Experimental and modeling study of O and Cl atoms surface recombination reactions in O2 and Cl2 plasmas
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Experimental and modeling study of O and Cl atoms surface recombination reactions in O2 and Cl2 plasmas

  • Luc Stafford , Joydeep Guha , Rohit Khare , Stefano Mattei , Olivier Boudreault , Boris Clain and Vincent M. Donnelly
Published/Copyright: May 4, 2010

Online erschienen: 2010-5-4
Erschienen im Druck: 2010-5-4

© 2013 Walter de Gruyter GmbH, Berlin/Boston

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