Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas

Annemie Bogaerts; Christophe De Bie; Maxie Eckert; Violeta Georgieva; Tom Martens; Erik Neyts; Stefan Tinck

doi:10.1351/PAC-CON-09-09-20

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Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas

Annemie Bogaerts , Christophe De Bie , Maxie Eckert , Violeta Georgieva , Tom Martens , Erik Neyts and Stefan Tinck

Published/Copyright: February 20, 2010

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From the journal Pure and Applied Chemistry Volume 82 Issue 6

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Bogaerts, Annemie, De Bie, Christophe, Eckert, Maxie, Georgieva, Violeta, Martens, Tom, Neyts, Erik and Tinck, Stefan. "Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas" Pure and Applied Chemistry, vol. 82, no. 6, 2010, pp. 1283-1299. https://doi.org/10.1351/PAC-CON-09-09-20

Bogaerts, A., De Bie, C., Eckert, M., Georgieva, V., Martens, T., Neyts, E. & Tinck, S. (2010). Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas. Pure and Applied Chemistry, 82(6), 1283-1299. https://doi.org/10.1351/PAC-CON-09-09-20

Bogaerts, A., De Bie, C., Eckert, M., Georgieva, V., Martens, T., Neyts, E. and Tinck, S. (2010) Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas. Pure and Applied Chemistry, Vol. 82 (Issue 6), pp. 1283-1299. https://doi.org/10.1351/PAC-CON-09-09-20

Bogaerts, Annemie, De Bie, Christophe, Eckert, Maxie, Georgieva, Violeta, Martens, Tom, Neyts, Erik and Tinck, Stefan. "Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas" Pure and Applied Chemistry 82, no. 6 (2010): 1283-1299. https://doi.org/10.1351/PAC-CON-09-09-20

Bogaerts A, De Bie C, Eckert M, Georgieva V, Martens T, Neyts E, Tinck S. Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas. Pure and Applied Chemistry. 2010;82(6): 1283-1299. https://doi.org/10.1351/PAC-CON-09-09-20

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Online erschienen: 2010-2-20

Erschienen im Druck: 2010-4-20

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https://doi.org/10.1351/PAC-CON-09-09-20

Keywords for this article

computer modeling; fluid model; molecular dynamics; Monte Carlo; numerical simulation; plasma; plasma chemistry; plasma–surface interactions

Articles in the same Issue

Preface
Microplasma generation in artificial media and its potential applications
Optical diagnostics in dielectric barrier discharges at atmospheric pressure
Diagnostic-based modeling on a micro-scale atmospheric-pressure plasma jet
Atmospheric-pressure plasma sources: Prospective tools for plasma medicine
Plasma functionalization of textiles: Specifics and possibilities
High-power impulse magnetron sputtering and its applications
Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch
Dust particles in low-pressure plasmas: Formation and induced phenomena
Modeling of the plasma chemistry and plasma–surface interactions in reactive plasmas
Experimental and modeling study of O and Cl atoms surface recombination reactions in O2 and Cl2 plasmas
Liquid-phase laser ablation
Plasma catalysis: A solution for environmental problems
Innovative in-flight glass-melting technology using thermal plasmas