Novel Methods for the Site Specific Preparation of Micromechanical Structures

References / Literatur

[1] Petch, N. J.: The Cleavage Strength of Polycrystals. J. Iron Steel, 174, 1953, p. 25.Suche in Google Scholar

[2] Hall, E. O.: The Deformation and Ageing of Mild Steel. Proc. Phys. Soc. Lond. B, 64, 1951, p. 747. 10.1088/0370-1301/64/9/303Suche in Google Scholar

[3] Arzt, E.: Size effects in materials due to microstructural and dimensional constraints: a comparative review. Acta Mater., 46, 1998, p. 5611. 10.1016/S1359-6454(98)00231-6Suche in Google Scholar

[4] Kiener, D.; Rester, M.; Scheriau, S.; Yang, B.; Pippan, R.; Dehm, G.: Influence of External and Internal Length Scale of the Flow Stress of Copper. Int. J. Mat. Res., 98, 2007, p. 1047. 10.3139/146.101578Suche in Google Scholar

[5] Uchic, M. D.; Shade, P. A.; Dimiduk, D.: Plasticity of Micrometer-Scale Single Crystals in Compression. Ann. Rev. Mater. Res., 39, 2009, p. 361. 10.1146/annurev-matsci-082908-145422Suche in Google Scholar

[6] Uchic, M. D.; Dimiduk, D. M.; Florando, J. N.; Nix, W. D.: Sample Dimensions Influence Strength and Crystal Plasticity. Science, 305, 2004, p. 986. 10.1126/science.1098993Suche in Google Scholar PubMed

[7] Dehm, G.: Miniaturized single-crystalline fcc metals deformed in tension: New insights in size-dependent plasticity. Prog. Mater. Sci., 54, 2009, p. 664. 10.1016/j.pmatsci.2009.03.005Suche in Google Scholar

[8] Kraft, O.; Gruber, P. A.; Mönig, R.; Weygand, D.: Plasticity in Confined Dimensions. Ann. Rev. Mater. Res., 40, 2010, p. 293. 10.1146/annurev-matsci-082908-145409Suche in Google Scholar

[9] Orowan, E.Discussion on Internal Stresses. Symposium on Internal Stresses in Metals and Alloys. London: The Institute of Metals, 1948. p.451.Suche in Google Scholar

[10] Brenner, S. S.: Growth and Properties of Whiskers. Science, 128, 1958, p. 569. 10.1126/science.128.3324.569Suche in Google Scholar PubMed

[11] Richter, G.; Hillerich, K.; Gianola, D. S.; Mönig, R.; Kraft, O.; Volkert, C. A.: Ultrahigh Strength Single Crystalline Nanowhiskers Grown by Physical Vapor Deposition. Nano Lett., 9, 2009, p. 3048. 10.1021/nl9015107Suche in Google Scholar PubMed

[12] Dou, R.; Derby, B.: The strength of gold nanowire forests. Scripta Mater., 59, 2008, p. 151. 10.1016/j.scriptamat.2008.02.046Suche in Google Scholar

[13] Burek, M. J.; Greer, J. R.: Fabrication and Microstructure Control of Nanoscale Mechanical Testing Specimens via Electron Beam Lithography and Electroplating. Nano Lett., 10, 2010, p. 69. 10.1021/nl902872wSuche in Google Scholar

[14] Smolka, M.; Motz, C.; Detzel, T.; Robl, W.; Griesser, T.; Wimmer, A.; Dehm, G.: Novel temperature dependent tensile test of freestanding copper thin film structures. Rev. Sci. Instrum., 83, 2012, p. 064702. 10.1063/1.4725529Suche in Google Scholar

[15] Volkert, C. A.; Minor, A. M.: Focused ion beam microscopy and micromachining. MRS Bull., 32, 2007, p. 389. 10.1557/mrs2007.62Suche in Google Scholar

[16] Giannuzzi, L. A.; Stevie, F. A.: A review of focused ion beam milling techniques for TEM specimen preparation. Micron, 30, 1999, p. 197. 10.1016/S0968-4328(99)00005-0Suche in Google Scholar

[17] Moser, G.; Felber, H.; Rashkova, B.; Imrich, P. J.; Kirchlechner, C.; Grosinger, W.; Motz, C.; Dehm, G.; Kiener, D.: Sample Preparation by Metallography and Focused Ion Beam for Nanomechanical Testing. Pract. Metallogr., 49, 2012, p. 343. 10.3139/147.110171Suche in Google Scholar

[18] Ziegler, J. F.; Biersack, J. P.; Littmark, U.The Stopping Range of Ions in Matter. New York: Pergamon Press, 1985.10.1007/978-1-4615-8103-1_3Suche in Google Scholar

[19] Kiener, D.; Grosinger, W.; Dehm, G.; Pippan, R.: A further step towards an understanding of size-dependent crystal plasticity: In-situ tension experiments of miniaturized single crystal copper samples. Acta Mater., 56, 2008, p. 580. 10.1016/j.actamat.2007.10.015Suche in Google Scholar

[20] Imrich, P. J.; Kirchlechner, C.; Motz, C.; Dehm, G.: Differences in deformation behavior of bicrystalline Cu micropillars containing a twin boundary or a large-angle grain boundary. Acta Mater., 73, 2014, p. 240. 10.1016/j.actamat.2014.04.022Suche in Google Scholar

[21] Kiener, D.; Motz, C.; Dehm, G.; Pippan, R.: Overview on established and novel FIB based miniaturized mechanical testing using in-situ SEM. Int. J. Mat. Res., 100, 2009, p. 1074. 10.3139/146.110149Suche in Google Scholar

[22] Gianola, D. S.; Sedlmayr, A.; Monig, R.; Volkert, C. A.; Major, R. C.; Cyrankowski, E.; Asif, S. A. S.; Warren, O. L.; Kraft, O.: In situ nanomechanical testing in focused ion beam and scanning electron microscopes. Rev. Sci. Instrum., 82, 2011, p. 063901. 10.1063/1.3595423Suche in Google Scholar PubMed

[23] Wurster, S.; Motz, C.; Jenko, M.; Pippan, R.: Micrometer-Sized Specimen Preparation Based on Ion Slicing Technique. Adv. Eng. Mater., 12, 2010, p. 61. 10.1002/adem.200900263Suche in Google Scholar

[24] Matoy, K.; Schönherr, H.; Detzel, T.; Schöberl, T.; Pippan, R.; Motz, C.; Dehm, G.: A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. Thin Solid Films, 518, 2009, p. 247. 10.1016/j.tsf.2009.07.143Suche in Google Scholar

[25] Schöngrundner, R.; Treml, R.; Antretter, T.; Kozic, D.; Ecker, W.; Kiener, D.; Brunner, R.: Critical assessment of the determination of residual stress profiles in thin films by means of the ion beam layer removal method. Thin Solid Films, 564, 2014, p. 321. 10.1016/j.tsf.2014.06.003Suche in Google Scholar

[26] Shade, P. A.; Kim, S.-L.; Wheeler, R.; Uchic, M. D.: Stencil mask methodology for the parallelized production of microscale mechanical test samples. Rev. Sci. Instrum., 83, 2012, p. 053903. 10.1063/1.4720944Suche in Google Scholar PubMed

[27] Kiener, D.; Motz, C.; Schöberl, T.; Jenko, M.; Dehm, G.: Determination of Mechanical Properties of Copper at the Micron Scale. Adv. Eng. Mater., 8, 2006, p. 1119. 10.1002/adem.200600129Suche in Google Scholar

[28] Kiener, D.; Motz, C.; Dehm, G.: Micro-compression testing: A critical discussion of experimental constraints. Mater. Sci. Eng. A, 505, 2009, p. 79. 10.1016/j.msea.2009.01.005Suche in Google Scholar

[29] Kiener, D.; Motz, C.; Grosinger, W.; Weygand, D.; Pippan, R.: Cyclic response of copper single crystal micro-beams. Scripta Mater., 63, 2010, p. 500. 10.1016/j.scriptamat.2010.05.014Suche in Google Scholar

[30] Kiener, D.; Minor, A. M.: Source Truncation and Exhaustion: Insights from Quantitative in situ TEM Tensile Testing. Nano Lett., 11, 2011, p. 3816. 10.1021/nl201890sSuche in Google Scholar PubMed PubMed Central

[31] Greer, J. R.; De Hosson, J. T. M.: Plasticity in small-sized metallic systems: Intrinsic versus extrinsic size effect. Prog. Mater. Sci., 56, 2011, p. 654. 10.1016/j.pmatsci.2011.01.005Suche in Google Scholar

[32] Niederberger, C.; Mook, W. M.; Maeder, X.; Michler, J.: In situ electron backscatter diffraction (EBSD) during the compression of micropillars. Mater. Sci. Eng. A, 527, 2010, p. 4306. 10.1016/j.msea.2010.03.055Suche in Google Scholar

[33] Xie, K. Y.; Shrestha, S.; Cao, Y.; Felfer, P. J.; Wang, Y.; Liao, X.; Cairney, J. M.; Ringer, S. P.: The effect of pre-existing defects on the strength and deformation behavior of α-Fe nanopillars. Acta Mater., 61, 2013, p. 439. 10.1016/j.actamat.2012.09.022Suche in Google Scholar

[34] Massl, S.; Keckes, J.; Pippan, R.: A direct method of determining complex depth profiles of residual stresses in thin films on a nanoscale. Acta Mater., 55, 2007, p. 4835. 10.1016/j.actamat.2007.05.002Suche in Google Scholar