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Low temperature deposition with inductively coupled plasma

  • Seung-Hoon Lee , Dong-Ha Jung , Seung-Jae Jung , Seung-Chan Hong und Jung-Joong Lee EMAIL logo
Veröffentlicht/Copyright: 7. Januar 2022
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International Journal of Materials Research
Aus der Zeitschrift International Journal of Materials Research Band 97 Heft 4

Abstract

The processing temperature of chemical and physical vapor deposition could be successfully lowered by applying inductively coupled plasma without deteriorating the film quality. Despite the low process temperature, the deposition rate was higher than that observed in conventional deposition processes, and the impurity content could be kept low. Some examples of inductively coupled plasma applicationse. g. TiB2, TiN, TiO2, and SnO2 films are shown.

Keywords: Inductively coupled plasma; TiB2; TiN; TiO2; SnO2
Jung-Joong Lee Seoul National University 151-742 Seoul, South Korea Tel.: +850 02 880 1096 Fax: +850 02 885 9671

Dedicated to Prof. Dr. Ferdinand Sommer on the occasion of his 65th birthday

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Received: 2005-10-04
Accepted: 2005-12-11
Published Online: 2022-01-07

© 2006 Carl Hanser Verlag, München

Artikel in diesem Heft

  1. Frontmatter
  2. Editorial
  3. Evolution of the mixed-mode character of solid-state phase transformations in metals involving solute partitioning
  4. Liquid–liquid interfacial tension in themonotectic alloy (Al34.5Bi65.5)95Si5 (wt.%)
  5. Influence of Sb additions on surface tension and density of Sn–Sb, Sn–Ag–Sb and Sn–Ag–Cu–Sb alloys: Experiment vs. modeling
  6. Liquid–liquid transition in elemental liquids investigated by sound velocity measurements: trends in the periodic table
  7. Bulk and surface properties of liquid Ga–Tl and Zn–Cd alloys
  8. Structure-induced order – disorder transformation in Cd – Na liquid alloys
  9. An indirect approach to measure glass transition temperature in metallic glasses
  10. Fragility, kinetic stability and phase separations in the undercooled state of bulk glass formers – a case study on metallic model systems
  11. Development of long-period ordered structures during crystallisation of amorphous Mg80Cu10Y10 and Mg83Ni9Y8
  12. Isothermal crystallization behavior of undercooled liquid Pd40Cu30Ni10P20 in terms of crystal growth, overall volume crystallization kinetics and their relation to the viscosity temperature dependence
  13. The magnesium-ytterbium system: A contribution to the thermodynamics of solid alloys
  14. Experimental investigation and thermodynamic modelling of the Mg–Al-rich region of the Mg–Al–Sr System
  15. Thermodynamic properties and phase relations of Zn-rich alloys in the system Pt–Zn
  16. Comparison of thermodynamic data of the ternary Cu–Sn–Zn system, measured with the EMF and with the calorimetric method
  17. Analysis of phase formation in Ni-rich alloys of the Ni–Ta–W system by calorimetry, DTA, SEM, and TEM
  18. Site preference, thermodynamic, and magnetic properties of the ternary Laves phase Ti(Fe1 – xAlx)2 with the crystal structure of the MgZn2-type
  19. Activity measurements on the Al-rich region of the Ni–Al system – A high temperature mass spectrometric study
  20. Metastable phases and nanocrystalline-forming ability (NFA) of melt-quenched Ni-rich (Zr, Hf)–Ni alloys
  21. Low temperature deposition with inductively coupled plasma
  22. Instructions for Authors
  23. Personal/Personelles
  24. Press/Presse
  25. Conferences/Konferenzen
  26. Frontmatter
  27. Editorial
  28. Editorial
  29. BBasic
  30. Evolution of the mixed-mode character of solid-state phase transformations in metals involving solute partitioning
  31. Liquid–liquid interfacial tension in themonotectic alloy (Al34.5Bi65.5)95Si5 (wt.%)
  32. Influence of Sb additions on surface tension and density of Sn–Sb, Sn–Ag–Sb and Sn–Ag–Cu–Sb alloys: Experiment vs. modeling
  33. Liquid–liquid transition in elemental liquids investigated by sound velocity measurements: trends in the periodic table
  34. Bulk and surface properties of liquid Ga–Tl and Zn–Cd alloys
  35. Structure-induced order – disorder transformation in Cd – Na liquid alloys
  36. An indirect approach to measure glass transition temperature in metallic glasses
  37. Fragility, kinetic stability and phase separations in the undercooled state of bulk glass formers – a case study on metallic model systems
  38. Development of long-period ordered structures during crystallisation of amorphous Mg80Cu10Y10 and Mg83Ni9Y8
  39. Isothermal crystallization behavior of undercooled liquid Pd40Cu30Ni10P20 in terms of crystal growth, overall volume crystallization kinetics and their relation to the viscosity temperature dependence
  40. The magnesium-ytterbium system: A contribution to the thermodynamics of solid alloys
  41. Experimental investigation and thermodynamic modelling of the Mg–Al-rich region of the Mg–Al–Sr System
  42. Thermodynamic properties and phase relations of Zn-rich alloys in the system Pt–Zn
  43. Comparison of thermodynamic data of the ternary Cu–Sn–Zn system, measured with the EMF and with the calorimetric method
  44. Analysis of phase formation in Ni-rich alloys of the Ni–Ta–W system by calorimetry, DTA, SEM, and TEM
  45. Site preference, thermodynamic, and magnetic properties of the ternary Laves phase Ti(Fe1 – xAlx)2 with the crystal structure of the MgZn2-type
  46. Activity measurements on the Al-rich region of the Ni–Al system – A high temperature mass spectrometric study
  47. Metastable phases and nanocrystalline-forming ability (NFA) of melt-quenched Ni-rich (Zr, Hf)–Ni alloys
  48. AApplied
  49. Low temperature deposition with inductively coupled plasma
  50. Notifications/Mitteilungen
  51. Instructions for Authors
  52. Personal/Personelles
  53. Press/Presse
  54. Conferences/Konferenzen
https://doi.org/10.1515/ijmr-2006-0077
Schlagwörter für diesen Artikel
Inductively coupled plasma; TiB2; TiN; TiO2; SnO2

Artikel in diesem Heft

  1. Frontmatter
  2. Editorial
  3. Evolution of the mixed-mode character of solid-state phase transformations in metals involving solute partitioning
  4. Liquid–liquid interfacial tension in themonotectic alloy (Al34.5Bi65.5)95Si5 (wt.%)
  5. Influence of Sb additions on surface tension and density of Sn–Sb, Sn–Ag–Sb and Sn–Ag–Cu–Sb alloys: Experiment vs. modeling
  6. Liquid–liquid transition in elemental liquids investigated by sound velocity measurements: trends in the periodic table
  7. Bulk and surface properties of liquid Ga–Tl and Zn–Cd alloys
  8. Structure-induced order – disorder transformation in Cd – Na liquid alloys
  9. An indirect approach to measure glass transition temperature in metallic glasses
  10. Fragility, kinetic stability and phase separations in the undercooled state of bulk glass formers – a case study on metallic model systems
  11. Development of long-period ordered structures during crystallisation of amorphous Mg80Cu10Y10 and Mg83Ni9Y8
  12. Isothermal crystallization behavior of undercooled liquid Pd40Cu30Ni10P20 in terms of crystal growth, overall volume crystallization kinetics and their relation to the viscosity temperature dependence
  13. The magnesium-ytterbium system: A contribution to the thermodynamics of solid alloys
  14. Experimental investigation and thermodynamic modelling of the Mg–Al-rich region of the Mg–Al–Sr System
  15. Thermodynamic properties and phase relations of Zn-rich alloys in the system Pt–Zn
  16. Comparison of thermodynamic data of the ternary Cu–Sn–Zn system, measured with the EMF and with the calorimetric method
  17. Analysis of phase formation in Ni-rich alloys of the Ni–Ta–W system by calorimetry, DTA, SEM, and TEM
  18. Site preference, thermodynamic, and magnetic properties of the ternary Laves phase Ti(Fe1 – xAlx)2 with the crystal structure of the MgZn2-type
  19. Activity measurements on the Al-rich region of the Ni–Al system – A high temperature mass spectrometric study
  20. Metastable phases and nanocrystalline-forming ability (NFA) of melt-quenched Ni-rich (Zr, Hf)–Ni alloys
  21. Low temperature deposition with inductively coupled plasma
  22. Instructions for Authors
  23. Personal/Personelles
  24. Press/Presse
  25. Conferences/Konferenzen
  26. Frontmatter
  27. Editorial
  28. Editorial
  29. BBasic
  30. Evolution of the mixed-mode character of solid-state phase transformations in metals involving solute partitioning
  31. Liquid–liquid interfacial tension in themonotectic alloy (Al34.5Bi65.5)95Si5 (wt.%)
  32. Influence of Sb additions on surface tension and density of Sn–Sb, Sn–Ag–Sb and Sn–Ag–Cu–Sb alloys: Experiment vs. modeling
  33. Liquid–liquid transition in elemental liquids investigated by sound velocity measurements: trends in the periodic table
  34. Bulk and surface properties of liquid Ga–Tl and Zn–Cd alloys
  35. Structure-induced order – disorder transformation in Cd – Na liquid alloys
  36. An indirect approach to measure glass transition temperature in metallic glasses
  37. Fragility, kinetic stability and phase separations in the undercooled state of bulk glass formers – a case study on metallic model systems
  38. Development of long-period ordered structures during crystallisation of amorphous Mg80Cu10Y10 and Mg83Ni9Y8
  39. Isothermal crystallization behavior of undercooled liquid Pd40Cu30Ni10P20 in terms of crystal growth, overall volume crystallization kinetics and their relation to the viscosity temperature dependence
  40. The magnesium-ytterbium system: A contribution to the thermodynamics of solid alloys
  41. Experimental investigation and thermodynamic modelling of the Mg–Al-rich region of the Mg–Al–Sr System
  42. Thermodynamic properties and phase relations of Zn-rich alloys in the system Pt–Zn
  43. Comparison of thermodynamic data of the ternary Cu–Sn–Zn system, measured with the EMF and with the calorimetric method
  44. Analysis of phase formation in Ni-rich alloys of the Ni–Ta–W system by calorimetry, DTA, SEM, and TEM
  45. Site preference, thermodynamic, and magnetic properties of the ternary Laves phase Ti(Fe1 – xAlx)2 with the crystal structure of the MgZn2-type
  46. Activity measurements on the Al-rich region of the Ni–Al system – A high temperature mass spectrometric study
  47. Metastable phases and nanocrystalline-forming ability (NFA) of melt-quenched Ni-rich (Zr, Hf)–Ni alloys
  48. AApplied
  49. Low temperature deposition with inductively coupled plasma
  50. Notifications/Mitteilungen
  51. Instructions for Authors
  52. Personal/Personelles
  53. Press/Presse
  54. Conferences/Konferenzen
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