@article{LeeJungJungHongLee+2006+475+479,
url = {https://doi.org/10.1515/ijmr-2006-0077},
title = {Low temperature deposition with inductively coupled plasma},
title = {},
author = {Seung-Hoon Lee and Dong-Ha Jung and Seung-Jae Jung and Seung-Chan Hong and Jung-Joong Lee},
pages = {475--479},
volume = {97},
number = {4},
journal = {International Journal of Materials Research},
doi = {doi:10.1515/ijmr-2006-0077},
year = {2006},
lastchecked = {2026-05-02}
}