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Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering

  • Klaus Bewilogua EMAIL logo , Jochen Brand , Helge Thomsen , Martin Weber and Ralf Wittorf
Published/Copyright: February 16, 2022
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 96 Issue 9

Abstract

Metal containing and metal free amorphous diamond-like carbon films were prepared by reactive magnetron sputter deposition using targets from transition metals or graphite and acetylene as reactive gas. Both types of coating materials are well known for their low friction coefficients. However, metal containing films exhibit clearly lower wear resistances and lower hardness values than metal free films. To study the differences between both materials, tungsten containing and metal free coatings were compared. The deposition experiments were carried out in an industrial scale d.c. magnetron sputter machine. Transmission electron microscopy, secondary ion mass spectroscopy, and Raman spectroscopy as well as hardness measurements and wear tests were performed to characterize and to compare composition, structure, mechanical, and tribological properties of both coating materials.

Keywords: Sputter deposition; Diamond-like carbon; Hardness; Wear; Friction
Dr. Klaus Bewilogua Fraunhofer-Institut für Schicht- und Oberflächentechnik Bienroder Weg 54E, D-38108 Braunschweig, Germany Tel.: +49 531 2155 642 Fax: +49 531 2155 900

Dedicated to Professor Dr. Dr. h. c. Klaus Wetzig on the occasion of his 65th birthday

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Received: 2005-03-01
Accepted: 2005-06-22
Published Online: 2022-02-16

© 2005 Carl Hanser Verlag, München

Articles in the same Issue

  1. Frontmatter
  2. Kösterpreis
  3. Award/Preisverleihung
  4. Editorial
  5. Editorial
  6. Articles Basic
  7. Effect of interface strength on electromigration-induced inlaid copper interconnect degradation: Experiment and simulation
  8. Application of factor analysis in electron spectrometry (AES, XPS) for materials science
  9. Focussing and defocussing effects at radio frequency glow discharge optical emission spectroscopy analyses of thin films with partly nonconductive components
  10. Semi-flexible star-shaped molecules: conformational analysis of nano-segregated mesogens forming columnar liquid-crystal phases
  11. Articles Applied
  12. Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering
  13. Local texture and back-end defect in hot extruded AZ91 magnesium alloy
  14. A comparison of thermal stability in nanocrystalline Ni- and Co-based materials
  15. Microstructure and phase formation of Heusler thin film compounds
  16. Correlation between the average composition of coherent superlattice and the GMR properties of electrodeposited Co–Cu/Cu multilayers
  17. Articles Basic
  18. Towards a description of complex pearlite structures
  19. Modeling of axial strain in free-end torsion of textured copper
  20. Vacancies in plastically deformed copper
  21. An analytic and generalized formulation of the sin2 ψ-method
  22. Nanoindentation applied on a tungsten–copper composite before and after high-pressure torsion
  23. Articles Applied
  24. The local deformation behaviour of MMCs – an experimental study
  25. X-ray elastic constants determined by the combination of sin2 ψ and substrate-curvature methods
  26. Combining complementary techniques to study precipitates in steels
  27. Precipitation hardening in Mg–Zn–Sn alloys with minor additions of Ca and Si
  28. Notifications/Mitteilungen
  29. Personal
https://doi.org/10.1515/ijmr-2005-0173
Keywords for this article
Sputter deposition; Diamond-like carbon; Hardness; Wear; Friction

Articles in the same Issue

  1. Frontmatter
  2. Kösterpreis
  3. Award/Preisverleihung
  4. Editorial
  5. Editorial
  6. Articles Basic
  7. Effect of interface strength on electromigration-induced inlaid copper interconnect degradation: Experiment and simulation
  8. Application of factor analysis in electron spectrometry (AES, XPS) for materials science
  9. Focussing and defocussing effects at radio frequency glow discharge optical emission spectroscopy analyses of thin films with partly nonconductive components
  10. Semi-flexible star-shaped molecules: conformational analysis of nano-segregated mesogens forming columnar liquid-crystal phases
  11. Articles Applied
  12. Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering
  13. Local texture and back-end defect in hot extruded AZ91 magnesium alloy
  14. A comparison of thermal stability in nanocrystalline Ni- and Co-based materials
  15. Microstructure and phase formation of Heusler thin film compounds
  16. Correlation between the average composition of coherent superlattice and the GMR properties of electrodeposited Co–Cu/Cu multilayers
  17. Articles Basic
  18. Towards a description of complex pearlite structures
  19. Modeling of axial strain in free-end torsion of textured copper
  20. Vacancies in plastically deformed copper
  21. An analytic and generalized formulation of the sin2 ψ-method
  22. Nanoindentation applied on a tungsten–copper composite before and after high-pressure torsion
  23. Articles Applied
  24. The local deformation behaviour of MMCs – an experimental study
  25. X-ray elastic constants determined by the combination of sin2 ψ and substrate-curvature methods
  26. Combining complementary techniques to study precipitates in steels
  27. Precipitation hardening in Mg–Zn–Sn alloys with minor additions of Ca and Si
  28. Notifications/Mitteilungen
  29. Personal
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