%0 Journal Article
%U https://doi.org/10.1515/corrrev-2023-0051
%T Corrosion of stainless steels and corrosion protection strategies in the semiconductor manufacturing industry: a review
%B 
%A Chaoran Ma
%A Zhuoyang Du
%A Xiaohan Wang
%A Peng Zhou
%A Yang Zhao
%A Yong Hua
%A Cheng Su
%A Tao Zhang
%A Fuhui Wang
%D 2024
%J Corrosion Reviews
%V 42
%N 2
%P 127-161
%R doi:10.1515/corrrev-2023-0051
%[ 2026-04-30