Home Pulse-on-demand laser operation from nanosecond to femtosecond pulses and its application for high-speed processing
Article
Licensed
Unlicensed Requires Authentication

Pulse-on-demand laser operation from nanosecond to femtosecond pulses and its application for high-speed processing

  • Jaka Petelin , Luka Černe , Jaka Mur , Vid Agrež , Jernej Jan Kočica , Joerg Schille , Udo Loeschner and Rok Petkovšek EMAIL logo
Published/Copyright: July 14, 2021
Become an author with De Gruyter Brill

Abstract

In this manuscript we present a true pulse-on-demand laser design concept using two different approaches. First, we present a fiber master oscillator power amplifier (MOPA) based quasi-continuous wave (CW) laser, working at high modulation bandwidths, for generation of nanosecond pulses. Second, we present a hybrid chirped pulse amplification (CPA)-based laser, combining a chirped-pulse fiber amplifier and an additional solid-state amplifier, for generation of femtosecond pulses. The pulse-on-demand operation is achieved without an external optical modulator/shutter at high-average powers and flexible repetition rates up to 40 MHz, using two variants of the approach for near-constant gain in the amplifier chain. The idler and marker seed sources are combined in the amplifier stages and separated at the out using either wavelength-based separation or second harmonic generation (SHG)-generation-based separation. The nanosecond laser source is further applied to high throughput processing of thin film materials. The laser is combined with a resonant scanner, using the intrinsic pulse-on-demand operation to compensate the scanner’s sinusoidal movement. We applied the setup to processing of indium tin oxide (ITO) and metallic films on flexible substrates.


Corresponding author: Rok Petkovšek, Faculty of Mechanical Engineering, University of Ljubljana, Aškerčeva 6, SI-1000, Ljubljana, Slovenia, E-mail:

Funding source: Slovenian Research Agency 10.13039/501100004329

Award Identifier / Grant number: L2-9240

Award Identifier / Grant number: P2-0270

  1. Author contributions: All the authors have accepted responsibility for the entire content of this submitted manuscript and approved submission.

  2. Research funding: This work was funded by Slovenian Research Agency (P2-0270) (L2-9240).

  3. Conflict of interest statement: The authors declare no conflicts of interest regarding this article.

References

[1] R. De Loor, “Polygon scanner system for ultra short pulsed laser micro-machining applications,” Phys. Procedia, vol. 41, pp. 544–551, 2013, https://doi.org/10.1016/j.phpro.2013.03.114.Search in Google Scholar

[2] F. Harth, M. C. Piontek, T. Herrmann, and J. A. L’huillier, “Ultra high-speed micromachining of transparent materials using high PRF ultrafast lasers and new resonant scanning systems,” in Proc. SPIE 9736, Laser-based Micro- and Nanoprocessing X, vol. 97360N, San Francisco, CA, USA, SPIE LASE, 2016, p. 97360N.10.1117/12.2212816Search in Google Scholar

[3] J. Mur, B. Kavčič, and I. Poberaj, “Fast and precise Laguerre–Gaussian beam steering with acousto-optic deflectors,” Appl. Opt., vol. 52, no. 26, pp. 6506–6511, 2013, https://doi.org/10.1364/AO.52.006506.Search in Google Scholar PubMed

[4] J. Mur, B. Podobnik, and I. Poberaj, “Laser beam steering approaches for microstructuring of copper layers,” Opt. Laser. Technol., vol. 88, pp. 140–146, 2017, https://doi.org/10.1016/j.optlastec.2016.08.009.Search in Google Scholar

[5] J. Mur, J. Petelin, J. Schille, U. Loeschner, and R. Petkovšek, “Ultra-fast laser-based surface engineering of conductive thin films,” Appl. Surf. Sci., vol. 509, p. 144911, 2019. https://doi.org/10.1016/j.apsusc.2019.144911.Search in Google Scholar

[6] R. Petkovšek, V. Agrež, J. Petelin, L. Černe, U. Bünting, and B. Podobnik, “Pulses on demand in fibre and hybrid lasers,” SV-JME, vol. 65, no. 11–12, pp. 680–689, 2019, https://doi.org/10.5545/sv-jme.2019.6352.Search in Google Scholar

[7] M. Šajn, J. Petelin, V. Agrež, M. Vidmar, and R. Petkovšek, “DFB diode seeded low repetition rate fiber laser system operating in burst mode,” Opt. Laser. Technol., vol. 88, pp. 99–103, 2017, https://doi.org/10.1016/j.optlastec.2016.09.006.Search in Google Scholar

[8] R. Petkovšek, V. Agrež, F. Bammer, P. Jakopič, and B. Lenardič, “Experimental and theoretical study of gain switched Yb-doped fiber laser,” in Proc. SPIE 8601, Fiber Lasers X: Technology, Systems, and Applications, 2013, p. 860128.10.1117/12.2002324Search in Google Scholar

[9] V. Agrež and R. Petkovšek, “Gain-switched Yb-doped fiber laser for microprocessing,” Appl. Opt., vol. 52, no. 13, pp. 3066–3072, 2013.10.1364/AO.52.003066Search in Google Scholar PubMed

[10] J. Yang, Y. Tang, and J. Xu, “Development and applications of gain-switched fiber lasers,” Photonics Res., vol. 1, no. 1, pp. 52–57, 2013.10.1364/PRJ.1.000052Search in Google Scholar

[11] V. Agrež and R. Petkovšek, “Gain switch laser based on micro-structured Yb-doped active fiber,” Opt. Express, vol. 22, no. 5, pp. 5558–5563, 2014, https://doi.org/10.1364/OE.22.005558.Search in Google Scholar PubMed

[12] R. Petkovšek, V. Agrež, D. Sangla, J. Saby, R. B. Picard, and F. Salin, “Gain-switched ytterbium-doped rod-type fiber laser,” Laser Phys. Lett., vol. 11, no. 10, p. 105808, 2014.10.1088/1612-2011/11/10/105808Search in Google Scholar

[13] R. Petkovšek and V. Agrež, “Single stage Yb-doped fiber laser based on gain switching with short pulse duration,” Opt. Express, vol. 22, no. 2, pp. 1366–1371, 2014, https://doi.org/10.1364/OE.22.001366.Search in Google Scholar PubMed

[14] S. Breitkopf, A. Klenke, T. Gottschall, et al., “GHz-bursts and ultrafast external modulation of femtosecond fiber lasers with kW average power levels,” in 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, p. cm_7_2, OSA Technical Digest, San Jose, CA, USA, 2019. [Online]. Available at: https://www.osapublishing.org/abstract.cfm?uri=CLEO_Europe-2019-cm_7_2 [accessed Feb. 11, 2020].10.1109/CLEOE-EQEC.2019.8872162Search in Google Scholar

[15] K. Motoshima, L. M. Leba, D. N. Chen, M. M. Downs, T. Li, and E. Desurvire, “Dynamic compensation of transient gain saturation in erbium-doped fiber amplifiers by pump feedback control,” IEEE Photonics Technol. Lett., vol. 5, no. 12, pp. 1423–1426, 1993, https://doi.org/10.1109/68.262563.Search in Google Scholar

[16] V. Novak, B. Podobnik, J. Možina, and R. Petkovšek, “Analysis of the thermal management system for a pump laser,” Appl. Therm. Eng., vol. 57, no. 1–2, pp. 99–106, 2013, https://doi.org/10.1016/j.applthermaleng.2013.03.060.Search in Google Scholar

[17] F. Harth, T. Herrmann, and J. A. L’huillier, “High power ultrafast laser with highly dynamic repetition rate and constant pulse energy from single pulse to 10 MHz,” in Proc. SPIE 10896, Solid State Lasers XXVIII: Technology and Devices, vol. 108960H, San Francisco, CA, USA, SPIE LASE, 2019, p. 108960H.10.1117/12.2507821Search in Google Scholar

[18] R. Petkovšek, V. Novak, and V. Agrež, “High power fiber MOPA based QCW laser delivering pulses with arbitrary duration on demand at high modulation bandwidth,” Opt. Express, vol. 23, no. 26, pp. 33150–33156, 2015, https://doi.org/10.1364/OE.23.033150.Search in Google Scholar PubMed

[19] R. Petkovšek, V. Novak, and V. Agrež, “Fiber laser for high speed laser transfer printing,” in Proc. SPIE 10254, XXI International Symposium on High Power Laser Systems and Applications 2016, 2017, vol. 0254, p. 1025403 https://doi.org/10.1117/12.2257862.Search in Google Scholar

[20] L. Černe, J. Petelin, and R. Petkovšek, “Femtosecond CPA hybrid laser system with pulse-on-demand operation,” Opt. Express, vol. 28, no. 6, pp. 7875–7888, 2020, https://doi.org/10.1364/OE.386769.Search in Google Scholar PubMed

[21] U. Quentin, F. Kanal, A. Budnicki, et al., “TruMicro 2000: next-generation flexible ultrashort pulse fiber lasers for scientific and industrial applications,” in Proc. SPIE 10897, Fiber Lasers XVI: Technology and Systems, vol. 108971M, San Francisco, CA, USA, SPIE LASE, 2019.Search in Google Scholar

[22] O. Yavas and M. Takai, “High-speed maskless laser patterning of indium tin oxide thin films,” Appl. Phys. Lett., vol. 73, no. 18, pp. 2558–2560, 1998, https://doi.org/10.1063/1.122532.Search in Google Scholar

[23] C. Molpeceres, S. Lauzurica, J. L. Ocaña, J. J. Gandía, L. Urbina, and J. Cárabe, “Microprocessing of ITO and a-Si thin films using ns laser sources,” J. Micromech. Microeng., vol. 15, no. 6, pp. 1271–1278, 2005, https://doi.org/10.1088/0960-1317/15/6/019.Search in Google Scholar

[24] M. Y. Xu, J. Li, L. D. Lilge, and P. R. Herman, “F2-laser patterning of indium tin oxide (ITO) thin film on glass substrate,” Appl. Phys. A, vol. 85, no. 1, pp. 7–10, 2006, https://doi.org/10.1007/s00339-006-3657-2.Search in Google Scholar

[25] Z. H. Li, E. S. Cho, and S. J. Kwon, “A new laser direct etching method of indium tin oxide electrode for application to alternative current plasma display panel,” Appl. Surf. Sci., vol. 255, no. 24, pp. 9843–9846, 2009, https://doi.org/10.1016/j.apsusc.2009.04.103.Search in Google Scholar

[26] M.-F. Chen, W.-T. Hsiao, Y.-S. Ho, S.-F. Tseng, and Y.-P. Chen, “Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate,” Thin Solid Films, vol. 518, no. 4, pp. 1072–1078, 2009, https://doi.org/10.1016/j.tsf.2009.06.063.Search in Google Scholar

[27] N. Farid, H. Chan, D. Milne, A. Brunton, and G. M. O’Connor, “Stress assisted selective ablation of ITO thin film by picosecond laser,” Appl. Surf. Sci., vol. 427, pp. 499–504, 2018, https://doi.org/10.1016/j.apsusc.2017.08.232.Search in Google Scholar

[28] D. Ashkenasi, G. Müller, A. Rosenfeld, et al., “Fundamentals and advantages of ultrafast micro-structuring of transparent materials,” Appl. Phys. A, vol. 77, no. 2, pp. 223–228, 2003. https://doi.org/10.1007/s00339-003-2143-3.Search in Google Scholar

[29] G. Raciukaitis, M. Brikas, M. Gedvilas, and G. Darcianovas, “Patterning of ITO on glass with picosecond lasers for oleds,” ICALEO, vol. 2006, no. 1, p. M304, 2006, https://doi.org/10.2351/1.5060888.Search in Google Scholar

[30] C. W. Cheng, I. M. Lee, and J. S. Chen, “Femtosecond laser processing of indium-tin-oxide thin films,” Opt. Laser. Eng., vol. 69, pp. 1–6, 2015, https://doi.org/10.1016/j.optlaseng.2015.01.011.Search in Google Scholar

[31] E. Matthias, M. Reichling, J. Siegel, et al., “The influence of thermal diffusion on laser ablation of metal films,” Appl. Phys. A, vol. 58, no. 2, pp. 129–136, 1994. https://doi.org/10.1007/BF00332169.Search in Google Scholar

[32] D. Paeng, J.-H. Yoo, J. Yeo, et al., “Low-cost facile fabrication of flexible transparent copper electrodes by nanosecond laser ablation,” Adv. Mater., vol. 27, no. 17, pp. 2762–2767, 2015. https://doi.org/10.1002/adma.201500098.Search in Google Scholar PubMed

[33] P. Lorenz, M. Klöppel, T. Smausz, et al., “Dynamics of the laser-induced nanostructuring of thin metal layers: experiment and theory,” Mater. Res. Express, vol. 2, no. 2, p. 026501, 2015. https://doi.org/10.1088/2053-1591/2/2/026501.Search in Google Scholar

[34] Z. Wang, S. Kuk, W. M. Kim, J. Jeong, and D. J. Hwang, “Picosecond laser scribing of bilayer molybdenum thin films on flexible polyimide substrate,” Appl. Surf. Sci., vol. 493, pp. 320–330, 2019, https://doi.org/10.1016/j.apsusc.2019.06.251.Search in Google Scholar

[35] G. Heise, M. Domke, J. Konrad, S. Sarrach, J. Sotrop, and H. P. Huber, “Laser lift-off initiated by direct induced ablation of different metal thin films with ultra-short laser pulses,” J. Phys. D Appl. Phys., vol. 45, no. 31, p. 315303, 2012, https://doi.org/10.1088/0022-3727/45/31/315303.Search in Google Scholar

[36] S. Xiao, B. Schöps, and A. Ostendorf, “Selective ablation of thin films by ultrashort laser pulses,” Phys. Procedia, vol. 39, pp. 594–602, 2012, https://doi.org/10.1016/j.phpro.2012.10.078.Search in Google Scholar

[37] D. J. Joe, S. Kim, J. H. Park, et al., “Laser–material interactions for flexible applications,” Adv. Mater., vol. 29, no. 26, p. 1606586, 2017. https://doi.org/10.1002/adma.201606586.Search in Google Scholar PubMed

[38] S. I. Kudryashov and A. A. Ionin, “Multi-scale fluence-dependent dynamics of front-side femtosecond laser heating, melting and ablation of thin supported aluminum film,” Int. J. Heat Mass Tran., vol. 99, pp. 383–390, 2016, https://doi.org/10.1016/j.ijheatmasstransfer.2016.03.097.Search in Google Scholar

[39] L. Černe, J. Novak, V. Agrež, and R. Petkovšek, “Optimization of a supercontinuum source based on tapered ordinary fibers,” Laser Phys., vol. 29, no. 2, p. 025103, 2019, https://doi.org/10.1088/1555-6611/aaf640.Search in Google Scholar

[40] L. Černe, P. Šušnjar, and R. Petkovšek, “Compensation of optical nonlinearities in a femtosecond laser system in a broad operation regime,” Opt. Laser. Technol., vol. 135, p. 106706, 2021, https://doi.org/10.1016/j.optlastec.2020.106706.Search in Google Scholar

Received: 2021-04-23
Accepted: 2021-06-25
Published Online: 2021-07-14
Published in Print: 2021-11-25

© 2021 Walter de Gruyter GmbH, Berlin/Boston

Downloaded on 7.9.2025 from https://www.degruyterbrill.com/document/doi/10.1515/aot-2021-0020/pdf
Scroll to top button