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Interferometric femtosecond laser processing for nanostructuring inside thin film

  • Stephen Ho

    Stephen Ho is a postdoctoral fellow at the University of Toronto. His interest in Biomedical Engineering led him to study Engineering Science at the University of Toronto and received his B.A.Sc. degree in 2002. He furthered his studies and he received his M.A.Sc. degree (2005) and PhD (2013) in Electrical and Computer Engineering under the Photonics Group at the University of Toronto. The title of Stephen’s thesis was ‘Femtosecond Laser Microfabrication of Optofluidic Lab-on-a-Chip with Selective Chemical Etching’. Stephen now continues his research interest and works on femtosecond laser micro and nano-machining, laser fabrication of optofluidic lab-on-a-chip and 3-D structures inside transparent dielectric materials.

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    , Kitty Kumar

    Kitty Kumar is a postdoctoral fellow at Harvard University. She earned her first MSc in the Department of Physics at Panjab University, India. Her fascination with manipulating materials at nano-scale to change their properties for a broad range of applications by using fundamental science and advance tools led her earn second MSc degree in Physics at Memorial University, Canada followed by PhD in Materials Science and Engineering at the University of Toronto. She is focused on developing new techniques for engineering materials for various applications and understanding the underlying physical phenomenon. The title of her PhD thesis is “High performance inverted pyramidal texture for silicon photovoltaics”. She now continues her research at Harvard University on bioinspired materials.

    , Kenneth K.C. Lee

    Kenneth K.C. Lee received his B.A.Sc. degree in Engineering Science from the University of Toronto in 2009. He is currently a PhD candidate in the Department of Electrical and Computer Engineering at the University of Toronto, Ontario, Canada. He is exploring ways to improve polymer-based micro-actuator and to fabricate compact fibre-optic sensors with femtosecond laser direct writing. The miniature and flexible polymer actuator and optical sensor will serve as building blocks to create an advanced steerable biomedical catheter for minimally invasive surgical procedures.

    , Jianzhao Li

    Jianzhao Li received his BSc degree from Sichuan University, Chengdu, China, his MSc degree from Fudan University, Shanghai, China, and his PhD degree from the University of Electro-Communications, Tokyo, Japan. His research experience has covered laser, laser spectroscopy, nonlinear and quantum optics, laser material processing and micro/nano-fabrication. Currently he focuses on the mechanism study and application development of advanced laser micro/nano-fabrication assisted with 5-dimensional multimodal laser microscopy and spectroscopy. He is a member of OSA and SPIE.

    and Peter R. Herman

    Peter R. Herman received the B.Eng. degree (1980) in Engineering Physics at McMaster University. He earned M.A.Sc. (1982) and PhD (1986) degrees studying lasers and diatomic spectroscopy in the Physics Department at the University of Toronto followed with a post-doctoral position at the Institute of Laser Engineering in Osaka University, Japan (1987) to the study of laser-plasma physics and X-ray lasers. He joined the Department of Electrical and Computer Engineering at the University of Toronto in 1988 where he currently holds a full professor position. Professor Herman directs a large and collaborative research group that develops and applies laser technology and advanced beam delivery systems to control and harvest laser interactions in new frontiers of 3-D nanofabrication. This includes processing of optical materials aimed at lightwave circuits, microfluidics, optofluidic systems, biophotonic sensors, and smart medical catheters with end goals of new manufacturing processes towards the concepts of lab-on-a-fiber and lab-in-a-film microsystems. Our group has published more than 300 scientific journal and conference papers and generated 10 patents.

Published/Copyright: December 18, 2014
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Abstract

Femtosecond laser interactions inside transparent dielectric films of refractive index, nfilm, with tight focusing presents strong nonlinear interactions that can be preferentially confined at the fringe maxima as formed by Fabry-Perot interference, to generate thin nanoscale plasma disks separated on half-wavelength, λ/2nfilm. The nano-thin disk explosions can be controlled inside the film to cleave open subwavelength internal cavities at single or multiple periodic depths at low laser exposure, while higher exposure will eject a quantised number of film segments with segment thickness defined by the laser wavelength. This new method enables high-resolution film patterning for ejecting nanodisks at quantised film depth for colouring and three-dimensional (3D) surface structuring, as well as for fabrication of free-standing nanofilms.


Corresponding author: Stephen Ho, Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, 10 King’s College Road, Toronto, Ontario M5S 3G4, Canada, e-mail:

About the authors

Stephen Ho

Stephen Ho is a postdoctoral fellow at the University of Toronto. His interest in Biomedical Engineering led him to study Engineering Science at the University of Toronto and received his B.A.Sc. degree in 2002. He furthered his studies and he received his M.A.Sc. degree (2005) and PhD (2013) in Electrical and Computer Engineering under the Photonics Group at the University of Toronto. The title of Stephen’s thesis was ‘Femtosecond Laser Microfabrication of Optofluidic Lab-on-a-Chip with Selective Chemical Etching’. Stephen now continues his research interest and works on femtosecond laser micro and nano-machining, laser fabrication of optofluidic lab-on-a-chip and 3-D structures inside transparent dielectric materials.

Kitty Kumar

Kitty Kumar is a postdoctoral fellow at Harvard University. She earned her first MSc in the Department of Physics at Panjab University, India. Her fascination with manipulating materials at nano-scale to change their properties for a broad range of applications by using fundamental science and advance tools led her earn second MSc degree in Physics at Memorial University, Canada followed by PhD in Materials Science and Engineering at the University of Toronto. She is focused on developing new techniques for engineering materials for various applications and understanding the underlying physical phenomenon. The title of her PhD thesis is “High performance inverted pyramidal texture for silicon photovoltaics”. She now continues her research at Harvard University on bioinspired materials.

Kenneth K.C. Lee

Kenneth K.C. Lee received his B.A.Sc. degree in Engineering Science from the University of Toronto in 2009. He is currently a PhD candidate in the Department of Electrical and Computer Engineering at the University of Toronto, Ontario, Canada. He is exploring ways to improve polymer-based micro-actuator and to fabricate compact fibre-optic sensors with femtosecond laser direct writing. The miniature and flexible polymer actuator and optical sensor will serve as building blocks to create an advanced steerable biomedical catheter for minimally invasive surgical procedures.

Jianzhao Li

Jianzhao Li received his BSc degree from Sichuan University, Chengdu, China, his MSc degree from Fudan University, Shanghai, China, and his PhD degree from the University of Electro-Communications, Tokyo, Japan. His research experience has covered laser, laser spectroscopy, nonlinear and quantum optics, laser material processing and micro/nano-fabrication. Currently he focuses on the mechanism study and application development of advanced laser micro/nano-fabrication assisted with 5-dimensional multimodal laser microscopy and spectroscopy. He is a member of OSA and SPIE.

Peter R. Herman

Peter R. Herman received the B.Eng. degree (1980) in Engineering Physics at McMaster University. He earned M.A.Sc. (1982) and PhD (1986) degrees studying lasers and diatomic spectroscopy in the Physics Department at the University of Toronto followed with a post-doctoral position at the Institute of Laser Engineering in Osaka University, Japan (1987) to the study of laser-plasma physics and X-ray lasers. He joined the Department of Electrical and Computer Engineering at the University of Toronto in 1988 where he currently holds a full professor position. Professor Herman directs a large and collaborative research group that develops and applies laser technology and advanced beam delivery systems to control and harvest laser interactions in new frontiers of 3-D nanofabrication. This includes processing of optical materials aimed at lightwave circuits, microfluidics, optofluidic systems, biophotonic sensors, and smart medical catheters with end goals of new manufacturing processes towards the concepts of lab-on-a-fiber and lab-in-a-film microsystems. Our group has published more than 300 scientific journal and conference papers and generated 10 patents.

Acknowledgments

We thank the Canadian Centre for Electron Microscopy at McMaster University, which is supported by the Natural Sciences and Engineering Research Council of Canada (NSERC) and other government agencies, for performing the SEM and focused ion beam work. This work was supported by NSERC and the University of Toronto.

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Received: 2014-9-15
Accepted: 2014-10-27
Published Online: 2014-12-18
Published in Print: 2014-12-1

©2014 THOSS Media & De Gruyter

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