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The Modeling of the Radiation Enhanced Diffusion of Boron in Silicon

  • G.V. Gadiyak, , G.A. Kachurin, , V.I. Shatrov, and I.E. Tyshchenko,
Published/Copyright: June 1, 1994

Published Online: 1994-06

©2011 by Walter de Gruyter GmbH & Co.

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