A Bulk Micro-machined Accelerometer with Comb Fingers Sense Capacitors

Articles in the same Issue

1. CONTENTS
2. Dynamical Modeling and Simulation of a Laser-micromachined Vibration-based Micro Power Generator
3. State-of-the-art in Micro-Hotplates
4. Failure Modes of MEMS and Microscale Adhesive Contact Theory
5. Mechanical Stability and Sticking in a Model Microelectromechanical Systems (MEMS) under Casimir Forces–Part I: Corrections to the Casimir Force
6. Mechanical Stability and Sticking in a Model Microelectromechanical systems (MEMS) under Casimir Forces–Part II: The Role of the Casimir Effect
7. Elasticity Studies of the Critical Thickness of an Epilayer Deposited on a Substrate with Finite or Infinite Thickness
8. Experimental Study on the Internal Length Parameters in Nanoindentation
9. The Method of Micromeehanical Design in Virtual Reality Environment
10. A Multi-functional Microsensor System
11. The Failure of Nano-scale Liquid Film
12. Two Typical Samples in MEMS CAD
13. A Bulk Micro-machined Accelerometer with Comb Fingers Sense Capacitors
14. Studies on Microfluidic Systems and Related Topics