TY  - CHAP
UR  - https://doi.org/10.1515/9783112611203-034
TI  - EPM 87. Energy Pulse and Particle Beam Modification of Materials
T2  - International Conference held September 7—11, 1987 Dresden, G.D.R.
AU  - Panknin, D.
AU  - Wieser, E.
AU  - Fattachov, Ya.V.
AU  - Khaibullin, I.B
ED  - , 
PY  - 1988
PP  - Berlin, Boston
PB  - De Gruyter
DO  - doi:10.1515/9783112611203-034
T1  - Short time threshold for electrical activation of implanted and annealed GaAs
SP  - 190
EP  - 192
SN  - 9783112611203
Y2  - 2026-05-11
ER  -