@inbook{GrimaldiBaeriCampisanoPotiRimini+1979+55+60,
url = {https://doi.org/10.1515/9783112551127-007},
title = {Laser Induced As Profile Broadening in Amorphous Silicon Layers},
booktitle = {Volume 54, Number 1 July 1979},
author = {M. G. Grimaldi and P. Baeri and S. U. Campisano and G. Poti and E. Rimini},
editor = {Görlich},
publisher = {De Gruyter},
address = {Berlin, Boston},
pages = {55--60},
doi = {doi:10.1515/9783112551127-007},
isbn = {9783112551127},
year = {1979},
lastchecked = {2026-05-07}
}