@inbook{Edelmann+1985+151+198,
url = {https://doi.org/10.1515/9783112484623-006},
title = {3. Schichten aus polykristallinem Silicium},
booktitle = {Struktur von Festkörpern der Mikroelektronik},
author = {Felix L. Edelmann},
editor = {Klaus Hübner},
publisher = {De Gruyter},
address = {Berlin, Boston},
pages = {151--198},
doi = {doi:10.1515/9783112484623-006},
isbn = {9783112484623},
year = {1985},
lastchecked = {2026-05-11}
}