@inbook{BagratishviliDzhanelidzeJishiashviliPiskanovskiiShiolashvili+1979+27+36,
url = {https://doi.org/10.1515/9783112472927-002},
title = {Boron Diffusion from a Reactively Sputtered Glass Source in Si and SiO2},
booktitle = {Volume 56, Number 1 November 16},
author = {G. D. Bagratishvili and R. B. Dzhanelidze and D. A. Jishiashvili and L. V. Piskanovskii and Z. N. Shiolashvili},
editor = {Görlich},
publisher = {De Gruyter},
address = {Berlin, Boston},
pages = {27--36},
doi = {doi:10.1515/9783112472927-002},
isbn = {9783112472927},
year = {1979},
lastchecked = {2026-05-11}
}