@article{GaluskaMorrison+1987+229+244,
url = {https://doi.org/10.1351/pac198759020229},
title = {Distribution analysis of major and trace elements through semiconductor layers of changing matrix using secondary ion mass spectrometry (SIMS)},
title = {},
author = {A. A. Galuska and G. H. Morrison},
pages = {229--244},
volume = {59},
number = {2},
journal = {Pure and Applied Chemistry},
doi = {doi:10.1351/pac198759020229},
year = {1987},
lastchecked = {2026-04-29}
}